They are diatoms, microscopic animals that secrete a hard calcium shell on which green algae grows. It can be really hard to remove. It is not dangerous to your tank at all, in fact it’s a sign of a healthy tank. Maybe with too much lighting.
You can scrape it off with razor blade if you have a GLASS tank only. If you have an acrylic tank it will scratch the crap out of it. Try using a credit card or something.